Edwards의 완전히 통합되고 유연한
진공 및 정화 솔루션은 위험한 공정에서 안전하게 작동되며
전체 운영 비용을 줄입니다.
Edwards는 반도체 공정을 위한 최적의 솔루션을 제공하는 데 전념하고 있으며 sub-fab 솔루션 부문의 뛰어난 전문 기술을 갖추고 있습니다. Edwards의 전 세계 분야별 전문 기술을 바탕으로 각 시스템에서 최적의 하드웨어 및 소프트웨어, 최상의 진공 및 배기부 관리 방법, 적절한 보조 장비를 제공하여 최적의 설치와 가장 안정적인 작동을 보장합니다.
Edwards의 통합 시스템은 모두 전 세계에서의 경험을 바탕으로 설계되었습니다. Edwards는 진공 및 정화 부문의 선두 업체로서, 무엇이 효율적인지 잘 알고 있습니다. Edwards는 우수한 제품을 요구하는 고객의 수요에 부응하여 끊임 없이 혁신하고 개선합니다.
integrated pump and abatement systems will bring significant benefits to EUV
lithography manufacturing. Our innovative leading technology
solutions and systemisation capabilities will bring improved process up-time,
yield, throughput and safety compliance whilst striving to balance the often
conflicting requirements of:
EZENITH offers an advanced portfolio of systems providing fully
integrated vacuum and exhaust management solutions for all of your
semiconductor processes applications. EZENITH systems are unique in offering:
With just a
pump and a gas abatement device, you still are not ready to run your process.
You will need to connect the pump exhaust, connect up your line heaters where
required, run your water, purge and electrical lines, and then get all of your
control signals ready. You will also have to consider double-enclosure, gas
leak detection, and how you want to conduct leak checks after your tool
maintenance. All of these things will cost you design time and money. We
understand the problem so we have developed integrated, process-specific
Our integrated systems are already pre-designed for
most semiconductor processes. The exhaust heaters are set for the correct
temperature to minimize cost and maximise up-time. We put leak check ports and
gate valves where they are required. The whole system is enclosed and, most
importantly, you only need to provide one of each of the required utilities. We
distribute the gases, water, electricity, and control signals where they are
needed and create a ready-to-go system.
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History
Learn more about our Integrated Solutions product offerings...
Integrated & Exhaust Management Solutions Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
Learn more about FabWorks Obsolescence